摘要
Thin films of the ternary compound Tb x Dy 1-x Fe 2-y were prepared by DC magnetron sputtering from a TbDyFe alloy target with the composition same as Terfenol-D alloy (Tb 0.32 Dy 0.68 Fe 1.92 ) onto 400 °C Si (001) substrates. The influence of post annealing temperature at 550 °C, 700 °C or 850 °C for 6 h are studied systematically on a series of Tb x Dy 1-x Fe 2-y samples. However, the annealing process leads to the incorporation of oxygen impurity into the thin film. To understand the effects of annealing temperature on the microstructural and crystalline degree of oxidation of RFe 2 thin film, different characterisation techniques such as anomalous X-ray scattering and electron probe micro-analyzer were performed. These measurements show that Fe clusters phase gets segregated from the bulk matrix during annealing at 550 °C and 850 °C but do not segregate while annealing at 700 °C. In this work, we present an anomalous X-ray diffraction measurement on Tb x Dy 1-x Fe 2-y to determine the composition ratio of rare earth oxides in thin film and compositional analysis.