Abstract
Atomic layer deposition (ALD) technology consisting of periodically repeated series of self-limited surface reactions is a CVD technique for the well-controlled deposition of inorganic layers with thickness in the nanometer scale which has been widely used in the semiconductor industry. In this study, a novel process to fabricate TiO 2 nano-layer with high uniformity by ALD on the graphite negative electrode of lithium battery is reported. We found that under accurate thickness control, a TiO 2 plated graphite electrode shows better performance in cycle life, compared with the pristine graphite. Electrochemical impedance spectroscopy (EIS) results showed that after 60 cycles, the cell resistance of the TiO 2 plated electrode decreased, while that of normal graphite electrode increased significantly. The enhanced performance of the electrode may be attributed to the TiO 2 plating, which suppressed the increase of resistance during the prolonged cycle. © 2012 Elsevier B.V. All rights reserved.