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Au Catalyzed Structural and Electrical Evolution of Ni/Au Contact to GaN
Journal article

Au Catalyzed Structural and Electrical Evolution of Ni/Au Contact to GaN

C.C. Kim, J.K. Kim, J.-L. Lee, J.H. Je, M.S. Yi, D.Y. Noh, Y. Hwu and P. Ruterana
Physica Status Solidi (A) Applied Research, Vol.188(1), pp.379-382
11/2001
DOI: https://doi.org/10.1002/1521-396X(200111)188:1<379::AID-PSSA379>3.0.CO;2-U
Appears in  keyword about Physics

Abstract

Electronic Optical and Magnetic Materials Condensed Matter Physics
We investigated the micro-structural and electrical behavior of Ni/Au contacts on GaN(0001) during annealing in N 2 and in air. The formation of a Ni 4 N phase deteriorates the contact resistivity if annealed in N 2 . Annealing in air, however, dramatically improves it. The oxidation, by creating the more energy favorable Ni-O bonds, seems to be the recipe to successfully suppress the formation of Ni 4 N, which otherwise would be enhanced significantly by the presence of Au as a catalyst.

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