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Battery-Less Electronic Layer Detectors Array (ELDA) for In-Tool DUV Detection by FinFET CMOS Technology
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Battery-Less Electronic Layer Detectors Array (ELDA) for In-Tool DUV Detection by FinFET CMOS Technology

Chien-Ping Wang, Wei-Hwa Lin, Burn Jeng Lin, Jiaw-Ren Shih, Yue-Der Chih, Jonathan Chang, Chrong Jung Lin 和 Ya-Chin King
IEEE Transactions on Electron Devices, 卷.68(10), 頁碼.4972-4976
10/2021
DOI: https://doi.org/10.1109/TED.2021.3101995

摘要

Deep ultraviolet (DUV) detectors array FinFET CMOS technology Electronic Optical and Magnetic Materials Electrical and Electronic Engineering
An in-tool, on-wafer detectors' array for monitoring deep ultraviolet (DUV) light is proposed and demonstrated in this work. The proposed electronic layer detectors array (ELDA) features FinFET CMOS compatibility and compact pixel structure. Its minimum pixel pitch can reach 0.7 μm, enabling the realization of high spatial resolution array. Most importantly, the sensing results from DUV exposure can be stored in the in-pixel storage node for days without external power supply, providing offline electrical nondestructive measurement and readout.

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