摘要
This study investigates the structural, mechanical, electrochemical, and biological performance of TiZrNbSiMo high entropy alloy (HEA) coatings deposited on 316L stainless steel and Si wafers using a hybrid HiPIMS-RF co-sputtering system. By varying the RF power applied to the Ti target (0-150 W), Ti content in the coatings was increased from 21.9 to 36.9 at. %, while all coatings retained an amorphous structure. The results indicate that the dense, featureless microstructure contributed to consistent hardness values (similar to 10 GPa) and excellent adhesion, with all samples exhibiting adhesion critical load, LC3, values exceeding 30 N. Corrosion resistance was significantly enhanced, particularly in the T100 coating containing 30.9 at. % Ti, which achieved a polarization resistance 18 times higher than bare 316L SS in Ringer's solution. In vitro assays using MG-63 osteoblast-like cells confirmed excellent cytocompatibility, with enhanced cell proliferation and migration across all HEAcoated surfaces. These findings demonstrate the potential of TiZrNbSiMo HEA coatings as multifunctional protective layers for biomedical implants, offering superior mechanical durability, corrosion resistance, and biocompatibility.