摘要
Aptamer-based field-effect transistor (FET) biosensors offer label-free, high-sensitivity detection of clinically relevant biomarkers but have rarely been implemented on monolithic CMOS (complementary metal- oxide-semiconductor) platforms. Here, we present the first CMOS-integrated aptasensor array that leverages the native titanium nitride (TiN) layer as the sensing electrode for aptamer functionalization and biodetection. Using cardiac biomarkers as representative targets, the proposed CMOS aptasensors exhibit high sensitivity in 1× phosphate-buffered saline. Detection of cardiac troponin I (cTnI) achieves a floating-gate potential response of -35 mV/dec, while N-terminal proB-type natriuretic peptide (NT-proBNP) detection exhibits a response of -25 mV/dec over concentrations from 0.1 fM to 100 pM. These sensitivities exceed those of previously reported cardiac-biomarker FET aptasensors. This work establishes a practical pathway toward high-throughput and clinically relevant CMOS aptasensor systems. © 2026 IEEE.