摘要
Flexible piezoelectric tactile sensors are well-suited for applications such as electronic skin and wearable devices due to their excellent sensitivity and conformability. While previous studies have largely focused on single piezoelectric sensors, this work emphasizes sensor arrays capable of spatiotemporal detection of distributed forces. The developed arrays are integrated with custom-designed complementary metal-oxide-semiconductor (CMOS) readout circuits, enabling efficient signal processing and system miniaturization. These circuits provide input resistances on the order of tens of gigaohms, significantly enhancing sensitivity at low frequencies. Three types of piezoelectric devices are utilized, with measured results demonstrating capabilities in pulse detection, vocal vibration monitoring, and mechanical vibration sensing. The developed 4× 4 array successfully detects spatially distributed forces. Sensing resolutions in the range of 5-14 Pa are achieved, as determined based on measured noise levels.