Abstract
In this paper, we summarize research activities and technological progress in the field of current CMOS-MEMS resonators and oscillators for portable sensor node and timing applications. By employing CMOS-based fabrication technologies, we can monolithically integrate MEMS devices and their associated application-specific integrated circuits (ASICs), thereby enhancing their overall performance as compared with their stand-alone counterparts. Owing to the diversity of post-CMOS processing techniques, in this review, we mainly focus on the devices achieved by so-called foundry-orientated CMOS-MEMS platforms. On the basis of how the mechanical structure is achieved, in the paper we focus on two major strategies:(i)additive back-end-of-line(BEOL)compatible layers and (ii)machining of standard CMOS layers for device fabrication. Given their superior CMOS integration capability, the circuitry design concepts, testing results, and potential merits of state-of-the-art CMOS-MEMS oscillators are also presented.