摘要
This study proposed and realized a capacitive proximity sensor based on the interdigitated electrode (IDE) with geometry that enhanced detection sensitivity by 47% when the sensor was laid flat. The conventional and linear IDE was modified with spline angles (the change of tangential angles along the curved electrodes in the xy-plane), increasing overlapping areas between electrodes and enhancing detection sensitivity; however, without sacrificing the footprint. Results indicated that spline angles showed positive relationship with the detection sensitivity regardless of the object distance in the range of 4–10 cm. Advanced studies were further carried out on deformed surfaces, which indicated practical applications scenarios on robots. The detection sensitivity was further enhanced by 32% and 30% when the surface was with convex (tension) and concave (compression), respectively. Comprehensive theoretical calculation, numerical evaluation, prototyping, and analysis were conducted with evidences in this article.
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•Splined interdigitated electrodes for proximity sensing with identical footprint.•Up to 47% enhancement in detection sensitivity when laid flat.•Supportive on deformed surfaces in robot applications.•Exhibits 32% and 26% further enhancement under tension and compression, respectively.•Achieved exceptional signal to noise ratio on average 66 dB.