摘要
This work presents a novel capacitive force sensor that not only detects typical forces (normal force, shear force, and shear angle) but also integrates precise rotational angle detection. Unlike conventional sensing units, the proposed sensor distinguishes rotational angles by analyzing the capacitive responses, enabling reliable detection of rotational angles within a linear dynamic window of ±2.5°. This advancement in rotational angle sensing is achieved through the development of appropriate algorithms, theoretical designs, and a rigorous physical fabrication process. The major achievement of this work lies in its ability to provide accurate rotational angle detection with a coefficient of determination of 0.990 on average, setting a new standard in precision for capacitive sensors. Additionally, the detection accuracy for shear force was improved by including torsional deformation, resulting in a reduction of detection tolerance from 1.51 % to 1.48 %. These enhancements provide significant operation flexibility, expanding the potential applications of the sensor in delicate object manipulation, precision assembly and microfluidic systems, where small force precision and reliable rotational angle detection are crucial.