Abstract
Suspended micro-beams made from aligned carbon nanotubes and parylene deflect reversibly in an ac field and the deflection rate is three orders of magnitude greater than those for existing devices. The direction of beam deflection is determined by the area moment of inertia and the actuation mechanism involves rapid accumulation of charges at tube surfaces, the creation of Coulomb repulsive forces between tubes, beam dilation and the formation of compressive stresses at beam ends. Tube alignment plays a crucial role in the first step as is verified by experimental data and calculation. © 2013 IOP Publishing Ltd.