Characterization of Microstructural Defects in Ion Implanted Silicon

Journal article

L.J. Chen, I.W.Wu, J.J.Wang and Y.C. Shih

Chinese Journal of Material Science Chinese Journal of Material Science, Vol.11(4), p.5

1980

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Title: Characterization of Microstructural Defects in Ion Implanted Silicon
Creators - without role: L.J. Chen - 國立清華大學工學院材料科學工程學系
I.W.Wu
J.J.Wang
Y.C. Shih
Publication Details: Chinese Journal of Material Science Chinese Journal of Material Science, Vol.11(4), p.5
Identifiers: 9957767681806774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Journal article