摘要
Recent advancements in integrated chemical microsystems have significantly enhanced the efficiency and precision of chemical synthesis. However, limitations in current materials and fabrication technologies pose challenges to developing robust flow regulation essential for system operation and scalability. This study presents a cleanroom-free, surface-modification-free bonding method for fabricating chemically inert microfluidic flow regulators with a glass-Teflon-glass structure. The fabrication process leverages the distinct melting temperatures of commercially available fluorinated ethylene propylene (FEP) and polytetrafluoroethylene (PTFE) films, utilizing their melting point differences to assign FEP as a thermal adhesive layer and PTFE as a movable diaphragm. The resulting flow regulator employs pneumatic pressure to control the system’s flow rate with linear and hysteresis-free performance. It withstands applied pressures up to 700 kPa—more than an order of magnitude higher than previously reported glass-Teflon valves—and operating temperatures as high as 150°C. Furthermore, the study demonstrates uniform flow distribution within a parallel microfluidic system designed for scalability and successful integration of multiple regulators into microfluidic channels. This practical and cost-effective fabrication method broadens the potential applications of chemically resistant microfluidic devices, particularly in chemical processes that require precise and reliable fluid control.