Abstract
The comparative measurements of the piezoelectric coefficient d 33 of a lead zirconate titanate (PZT) film by piezoresponse force microscopy based on tip/PZT/electrode and tip/electrode/PZT/electrode configurations were discussed. With the use of electrically characterized Au-coated tips, the obtained values were found to be in good agreement. The analysis showed that d 33 was reasonably determined without the use of a top electrode as long as the electrical quality of the tip was qualified.