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Complementary neutron and X-ray reflectivity for structural characterization of porous thin films
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Complementary neutron and X-ray reflectivity for structural characterization of porous thin films

Yu-Shan Huang, U-Ser Jeng, Chia-Hung Hsu, Naoya Torikai, Hsin-Yi Lee, Kwanwoo ShinMasahiro Hino
Physica B: Condensed Matter, 卷.385-386 I, 頁碼.667-669
11/2006

摘要

Contrast variation Neutron reflectivity Porous thin film X-ray reflectivity Electronic Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering
Neutron reflectivity (NR) and X-ray reflectivity (XR) have been measured for a silicon-gel-derived porous thin film, deposited on an oxide silicon wafer. The complementary NR and XR data provide a better determination of the film structure. With the two critical wavevectors for total reflection of neutrons and X-rays measured for the film, we have extracted the hydrogen content of the film. We have also discussed the strategy of using XR NR as a contrast to study the three-phase porous thin films. © 2006 Elsevier B.V. All rights reserved.

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