Abstract
This study integrated Failure Mode Effect and Criticality Analysis, Fault Tree, and Event Tree methods to develop a research framework for improving process technology in semiconductor industry. We specified the steps of the required data and cost for the implementation of FMEA. In particular, we used three cases in a semiconductor fabrication for illustrations. We discussed the requirements for implementing FMEA at high-tech industries, and concluded with future research. We found that the proposed framework can be used as a basis for improving process technologies and managing domain knowledge and findings.