Abstract
In this study, we report a novel method for controlling the shape of a micromachined bridge (clamped-clamped beam) by plasma surface modification. In short, the microbridge can be tuned to either buckle upward or downward using plasma treatment. To demonstrate the feasibility of this approach, NH 3 plasma treatments were employed to control the direction of buckling amplitude for a SiO 2 microbridge. Furthermore, the shape of a buckling microbridge can also be adjusted by the same technique. The buckling profiles predicted by finite element analysis are in agreement with those determined from the measurement. © 2006 The Japan Society of Applied Physics.