Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes (Nanoscale Res Lett, (2017), 12, (534), 10.1186/s11671-017-2309-0)

Yi-Pei Tsai; Ting-Huan Hsieh; Chrong Jung Lin; Ya-Chin King

doi:10.1186/s11671-017-2336-x

Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes (Nanoscale Res Lett, (2017), 12, (534), 10.1186/s11671-017-2309-0)

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Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes (Nanoscale Res Lett, (2017), 12, (534), 10.1186/s11671-017-2309-0)

Yi-Pei Tsai, Ting-Huan Hsieh, Chrong Jung Lin 和 Ya-Chin King

Nanoscale Research Letters, 卷.12, 584

2017

DOI: https://doi.org/10.1186/s11671-017-2336-x

摘要

Materials Science (all)

Condensed Matter Physics

In the original publication [1] Fig. 3 was presented incorrect. The correct additional file has been included with this erratum and the original article has been updated to rectify this error. (Figure Presented.).

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題名: Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes (Nanoscale Res Lett, (2017), 12, (534), 10.1186/s11671-017-2309-0)
創作者：: Yi-Pei Tsai (作者) - National Tsing Hua University
Ting-Huan Hsieh (作者) - National Tsing Hua University
Chrong Jung Lin (作者) - National Tsing Hua University
Ya-Chin King (作者) - National Tsing Hua University
學術資源類型: 期刊文章
出版日期: 2017
出版資訊: Nanoscale Research Letters, 卷.12, 584
語言: 英語

Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes (Nanoscale Res Lett, (2017), 12, (534), 10.1186/s11671-017-2309-0)

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