摘要
In the original publication [1] Fig. 3 was presented incorrect. The correct additional file has been included with this erratum and the original article has been updated to rectify this error. (Figure Presented.).
- 題名
- Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes (Nanoscale Res Lett, (2017), 12, (534), 10.1186/s11671-017-2309-0)
- 翻譯題名
- Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes (Nanoscale Res Lett, (2017), 12, (534), 10.1186/s11671-017-2309-0)
- 創作者：
- Yi-Pei Tsai (作者) - National Tsing Hua UniversityTing-Huan Hsieh (作者) - National Tsing Hua UniversityChrong Jung Lin (作者) - National Tsing Hua UniversityYa-Chin King (作者) - National Tsing Hua University
- 著作權
- © 2017, The Author(s).
- 學術資源類型
- 期刊文章
- 出版日期
- 2017
- 出版資訊
- Nanoscale Research Letters, 卷.12, 584
- 語言
- 英語