- Title
- Depth of Focus in Multi-Layered Media – A Long-Neglected Phenomenon Aroused by Immersion Lithography
- Creators - without role
- 本堅 林
- Publication Details
- Journal of Microlithography Microfabrication and Microsystems, Vol.3, pp.21-27
- Identifiers
- 9957767780606774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
Depth of Focus in Multi-Layered Media – A Long-Neglected Phenomenon Aroused by Immersion Lithography
Journal of Microlithography Microfabrication and Microsystems, Vol.3, pp.21-27
2004
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