摘要
Compressed thin-film gas between plates produces the squeeze-film damping force that comprises both dissipative and elastic effects. The latter is used in this work as the mechanism to modify structural resonance with respect to the change of ambient pressure. Capacitively sensed squeeze-film pressure sensors are implemented in a silicon-based fabrication platform. Nine designs with resonant plate sizes from 200 &null 200 to 800 &null 800 &null and different natural frequencies for the same size are comprehensively studied. Measured sensitivities range from 94 to 762 Hz/kPa. Both simulations and measurements show the design trade-off between sensitivity and quality factor. Required critical dimensions like gap spacing and structural thickness to increase the squeeze-film elastic effect are also analyzed.