Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor

期刊文章

Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor

IEEE Sensors Journal

2022

DOI: https://doi.org/10.1109/JSEN.2022.3220111

摘要

Capacitive sensing;CMOS-MEMS;Tactile Force Sensor

相關連結

指標

1 檢視次數

詳細資料

題名: Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor
創作者：: 維倫方 (作者)
學術資源類型: 期刊文章
出版日期: 2022
出版資訊: IEEE Sensors Journal
語言: 英語