摘要
A hard X-ray scanning microscope installed at the Hard X-ray Nanoprobe beamline of the National Synchrotron Light Source II has been designed, constructed and commissioned. The microscope relies on a compact, high stiffness, low heat dissipation approach and utilizes two types of nanofocusing optics. It is capable of imaging with ∼15nm × 15nm spatial resolution using multilayer Laue lenses and 25nm × 26nm resolution using zone plates. Fluorescence, diffraction, absorption, differential phase contrast, ptychography and tomography are available as experimental techniques. The microscope is also equipped with a temperature regulation system which allows the temperature of a sample to be varied in the range between 90K and 1000K. The constructed instrument is open for general users and offers its capabilities to the material science, battery research and bioscience communities.A multilayer Laue lenses based X-ray scanning microscope installed at the Nanoprobe beamline of the National Synchrotron Light Source II is described.