摘要
A new electrothermal actuator with X-shaped single crystal silicon beam structure is proposed and characterized. This new actuator is made by using SOI-DRIE processes. X-beam actuator of 2000 μm projection length and 0.5° tilted angle can generate 90 μm static displacement. This new design shows a better static displacement and stability in long travel range than the other actuators. From these experimental data, we conclude the feasibility of our new X-beam actuators. Any movable structure connected with one side of this X-beam can be pushed toward the other side. Therefore, it can be a basic actuation element in association with various structures for different applications. © Springer-Verlag 2005.