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Development of electroplated Ni-xZn films for under bump metallization application
Journal article   Peer reviewed

Development of electroplated Ni-xZn films for under bump metallization application

Hsiu-Min Lin and Jenq-Gong Duh
Surface and Coatings Technology, Vol.237, pp.445-449
25/12/2013

Abstract

Anomalous co-deposition Constant current density Constant deposition potential Ni-Zn Under bump metallization
The feasibility of using electroplated Ni-xZn films was evaluated for a new application as the under bump metallization. Considering the alloy films in electroplating process, determining the deposition potential (affecting nucleation) and current density (affecting growth) is crucial. A suitable Ni-5Zn film exhibiting smooth and dense surface was derived at a low current density of 0.067ASD. After a 30s liquid reaction, intermetallic phase formation and Cu 6 Sn 5 growth at the interface were visualized and analyzed using a field-emission electron probe microanalyzer. This study demonstrated that binary Ni-Zn films fabricated by electroplating might be a potential candidate for under bump metallization application. © 2013 Elsevier B.V.

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