摘要
Photonic nanojet can serve as a powerful tool for direct laser micro-machining based on a non-resonance focusing phenomenon. In this study, we propose a photonic nanojet-based direct micro-drilling technique for polymer material with low-cost and low-power continuous-wave laser. The high-quality photonic nanojet is produced using the microcone-shaped probe tip, which is fabricated by the dynamic chemical etching method. By utilizing laser photonic nanojet triggered thermoplasmonics, the high-aspect-ratio microcavity is fabricated with the low threshold value of laser power. The influences of the photonic nanojet peak intensities and distributions on the drilled microcavities are systematically investigated by the experiments and the finite-difference time-domain simulations. With the continuous-wave solid-state laser at a wavelength of 671 nm, the simulations show that the photonic nanojet with a quality factor of 103 is generated at a distance of similar to 20 mu m from the surface of the microcone-shaped tip with a beam waist of 252 nm in the x direction, which could overcome the diffraction limit. The experimental results show that the length and peak intensity of the photonic nanojet have increased considerably in the propagation direction by the microcone-shaped probe tip, which leads to form a deep microcavity in the polymer substrate with an aspect ratio of 5.73. The presented microcone-shaped probe tip has potential applications in processing sub-diffraction features with a high aspect ratio.