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Direct low-temperature nanographene CVD synthesis over a dielectric insulator
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Direct low-temperature nanographene CVD synthesis over a dielectric insulator

Mark H Rümmeli, Alicja Bachmatiuk, Andrew Scott, Felix Börrnert, Jamie H. Warner, Volker Hoffman, Jarrn-Horng Lin, Gianaurelio Cuniberti 和 Bernd Büchner
ACS nano, 卷.4(7), 頁碼.4206-4210
27/07/2010
PMID: 20586480
Web of Science ID: WOS:000280364800080

摘要

Acetylene - chemistry Carbon - chemistry Electric Impedance Magnesium Oxide - chemistry Nanostructures - chemistry Nanotechnology - methods Spectrum Analysis, Raman Temperature Volatilization
Graphene ranks highly as a possible material for future high-speed and flexible electronics. Current fabrication routes, which rely on metal substrates, require post-synthesis transfer of the graphene onto a Si wafer, or in the case of epitaxial growth on SiC, temperatures above 1000 degrees C are required. Both the handling difficulty and high temperatures are not best suited to present day silicon technology. We report a facile chemical vapor deposition approach in which nanographene and few-layer nanographene are directly formed over magnesium oxide and can be achieved at temperatures as low as 325 degrees C.

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