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Dynamic behavior of liquid microlenses actuated using dielectric force
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Dynamic behavior of liquid microlenses actuated using dielectric force

Chih-Cheng Yang, Chih-Wei Gary TsaiJ. Andrew Yeh
Journal of Microelectromechanical Systems, 卷.20(5), 頁碼.1143-1149
10/2011

摘要

Dielectric force dynamic response liquid microlenses Electrical and Electronic Engineering Mechanical Engineering
This paper presents a study of the dynamic responses of dielectric liquid microlenses via simulation and experiment. The dielectric force applied to the liquid microlenses was generated on the interface of two nonconductive isodensity liquids under ac biases. The dynamic responses of liquid microlenses of 0.5-10 mm in diameter were experimentally characterized; responses such as the dynamic contact angle and the response time with respect to viscosity, voltage, ac frequency, and droplet size were measured. The experimental results indicate that the viscosity and the droplet size are proportional to the response time. The applied ac frequency in the range of 1-50 kHz was inversely proportional to the response time. The contact angles in equilibrium were found to be inversely proportional to the ac frequency and the droplet size but nearly invariant to the viscosity. © 2011 IEEE.

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