Abstract
An electric field is applied to the substrate during the growth of aluminum films, with the results that the reflectance is increased, scattering is reduced, and the surface is smoothed.
- Title
- Effect of an electric field on the growth of aluminum film
- Creators - without role
- Cheng-Chung Lee - Natl Central UnivChii-hua Lee - Natl Central UnivShiuh Chao - Natl Central Univ
- Identifiers
- 9957772824206774
- Academic Unit
- College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- English
- Resource Type
- Journal article
- Publication Details
- Applied Optics, Vol.32(28), pp.5575-5578