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Effect of rapid thermal annealing on carrier lifetime in arsenic-ion-implanted GaAs
Journal article

Effect of rapid thermal annealing on carrier lifetime in arsenic-ion-implanted GaAs

Ci-Ling Pan, Gong-Ru Lin, Wen-Chung Chen, Feruz Ganikhanov and C.-S. Chang
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, p.138
1996

Abstract

LT-GaAs, with subpicosecond photoexcited carrier lifetime, is currently the premier material for fabricating ultrafast optoelectronic devices. An alternate arsenic-rich material, arsenic-ion-implanted (As + - implanted) GaAs, or GaAs:As + has recently emerged. The structural and electrical characteristics of GaAs:As + and LT-GaAs are very similar. Photoexcited carrier lifetime as short as 300 fs in GaAs:As + implanted at dose and energy of 10 12 ions/cm 2 and 200 KeV 3 . The effect of the thermal annealing process on the lifetime of photoexcited carriers in GaAs:As + is examined in this paper.

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