Effects of high working pressure on dielectric properties of sputtered (Ba,Sr)TiO3 films on Ir electrodes

Chih-Haung Lai; Y.C. Wu; S. Ma

doi:10.1116/1.1586277

Effects of high working pressure on dielectric properties of sputtered (Ba,Sr)TiO3 films on Ir electrodes

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Effects of high working pressure on dielectric properties of sputtered (Ba,Sr)TiO3 films on Ir electrodes

Chih-Haung Lai, Y.C. Wu 和 S. Ma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 卷.21(4), 頁碼.1464-1468

07/2003

DOI: https://doi.org/10.1116/1.1586277

摘要

Condensed Matter Physics

Surfaces and Interfaces

Surfaces

Coatings and Films

IrO ₂ was formed in situ during the deposition of BST films without postannealing. The mechanism of IrO ₂ formation and how the in situ formed IrO ₂ affects the dielectric properties of BST films were highlighted.

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題名: Effects of high working pressure on dielectric properties of sputtered (Ba,Sr)TiO3 films on Ir electrodes
翻譯題名: Effects of high working pressure on dielectric properties of sputtered (Ba,Sr)TiO3 films on Ir electrodes
創作者：: Chih-Haung Lai (作者) - National Tsing Hua University
Y.C. Wu (作者) - National Tsing Hua University
S. Ma (作者) - Applied Materials (United States)
學術資源類型: 期刊文章
出版日期: 07/2003
出版資訊: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 卷.21(4), 頁碼.1464-1468
語言: 英語

Effects of high working pressure on dielectric properties of sputtered (Ba,Sr)TiO3 films on Ir electrodes

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