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Effects of n -type modulation-doping barriers and a linear graded-composition GaInAsP intermediate layer on the 1.3 μm AlGaInAs/ AlGaInAs strain-compensated multiple-quantum-well laser diodes
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Effects of n -type modulation-doping barriers and a linear graded-composition GaInAsP intermediate layer on the 1.3 μm AlGaInAs/ AlGaInAs strain-compensated multiple-quantum-well laser diodes

Po-Hsun Lei, Chyi-Dar Yang, Ming-Yuan Wu, Meng-Chyi Wu, K.Y. Cheng, Chia-Chien Lin and Wen-Jeng Ho
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol.24(2), pp.623-628
03/2006

Abstract

We report the fabrication, characterization, and comparison of four 1.3 μm AlGaInAsAlGaInAs strain-compensated multiple-quantum-well (SC-MQW) laser structures: (1) sample A-with only an undoped SC-MQW active region, (2) sample B-with an undoped SC-MQW active region and a linear graded-composition (LGC) GaInAsP intermediate layer, (3) sample C-with an n -type modulation-doping (MD) SC-MQW active region, and (4) sample D-with an n -type MD-SC-MQW active region combined with a LGC GaInAsP intermediate layer. The inclusion of either n -type modulation-doped SC-MQW active region or LGC GaInAsP intermediate layer can improve the performance of a laser diode (LD). The LD sample D, which includes both an n -type MD-SC-MQW active region and a LGC GaInAsP intermediate layer, exhibits the best overall performance including a threshold current of 12.5 mA, a characteristic temperature of 85 K in 20-80 °C temperature range, a lasing wavelength shift of 0.38 nmK, and a relaxation frequency response of 9.9 GHz. © 2006 American Vacuum Society.

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