Abstract
The grazing incidence x-ray scattering technique was used to investigate the effects of thermal annealing on CdTe/CdS hetrojunctions. An accurate determination of the individual layer thickness, surface and interfacial roughness, and lateral and cross correlation lengths of layer height fluctuations was made by nondestructive method. The lateral and cross-correlation lengths become shorter with the increase in the annealed temperature. The small values of the texture coefficient indicated ruggedness in the hetrointerfaces.