摘要
A correlation evaluation system called the Procorrelation System (PCS) is discussed. PCS system is used for obtaining high-quality correlation between die failures on premanufactured recorded correlation wafer (RCW) and the wafer test equipment setup. PCS is a simple, fast, efficient, and economical software system used for the automatic verification of the ATE setup before the starting of the mass production process. It also facilitates the failure diagnosis and recovery in equipment setup. PCS greatly reduces analysis time and test costs, when compared with the conventional full-wafer probing techniques.