- Title
- Electrical Measurement of Submicrometer Contact Holes
- Creators - without role
- 本堅 林
- Identifiers
- 9957775493106774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
- Publication Details
- IEEE Transactions on Semiconductor Manufacturing, Vol.2, p.76
Journal article
Electrical Measurement of Submicrometer Contact Holes
IEEE Transactions on Semiconductor Manufacturing, Vol.2, p.76
1989
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