Abstract
A process to grow amorphous carbon (a-C) tubes (a-CT) by coupling two fabrication methods was presented. A layer of short aligned a-CT was deposited by LPCVD from SiCl 3 CCl 3 on an AAO substrate. The tubes were significantly elongated by employing the Na-filled AAO reactive template method. The average thickness of the array layer was estimated to be 800 nm, which was much thinner than the AAO thickness of 60 μm. The composition of the isolated tube array layer was confirmed to be carbon using energy dispersive spectroscopy (EDS). A successful deposition of a-C on AAO in the form of short a-CT was reported.