Enhancement of electrical property and thermal stability of (Ba,Sr)TiO3 thin films on Cu(Mg) bottom electrodes

Journal article

K. C. Tsai, W. F. Wu, C. G. Chao, J. T. Lee and S. W. Shen

Japan. J. Appl. Phys. Japan. J. Appl. Phys.

2006

Abstract

Thermal stability;Binary search trees;Electrodes;Temperature;Capacitors;Copper alloys;Oxidation;Annealing;Leakage current;Electric breakdown

1 Record Views

Title: Enhancement of electrical property and thermal stability of (Ba,Sr)TiO3 thin films on Cu(Mg) bottom electrodes
Creators - without role: K. C. Tsai
W. F. Wu - 國立清華大學原子科學院工程與系統科學系
C. G. Chao
J. T. Lee
S. W. Shen
Identifiers: 9957773575506774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Journal article
Publication Details: Japan. J. Appl. Phys. Japan. J. Appl. Phys.