Abstract
The study is intended to investigate the optimal content of nitrogen in the Zr-Cu-Ni-Al-N thin film metallic glass (TFMG) to achieve the improved mechanical and thermal properties. Various Zr-Cu-Ni-Al-N TFMGs were fabricated by manipulating the nitrogen flow rate. It is revealed that the maximum content of nitrogen in the Zr-Cu-Ni-Al-N TFMG is 8.2 at%. The thin film with more than 8.2 at% nitrogen is no longer a metallic glass due to the absence of characteristic peak in DSC analysis. Within the metallic glass region, the mechanical performance and thermal stability are significantly improved as the nitrogen content increases.