Enhancing manual inspection in semiconductor manufacturing with integrated augmented reality solutions

Journal article

志行瞿, 翁晨毓 and 陳侑孜

Journal of Manufacturing Systems, (77), pp.933-945

12/2024

Abstract

Augmented reality;Semiconductor manufacturing;Manual inspection;Human Error;Machine maintenance

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Title: Enhancing manual inspection in semiconductor manufacturing with integrated augmented reality solutions
Creators - without role: 志行瞿
翁晨毓
陳侑孜
Identifiers: 9957768650506774
Academic Unit: Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Journal article
Publication Details: Journal of Manufacturing Systems, (77), pp.933-945