Abstract
The evaporation behavior of the β-diketonates of copper, yttrium and barium were investigated in detail. The effects of sample characteristics and operating conditions, such as carrier gas flow rate, system pressure and temperature, and exposure area were studied. An empirical correlation, n = k 2 L 2 3 P -1 Q 1 9 exp(-ΔH/RT), which is based on a simple mass transfer model is proposed to describe the rate of evaporation for these β-diketonates. The L 2 3 term represents the effects of the exposure area of the organometallic sample. The calculated values agree well with our experimental data. The evaporation rate is, in general, very sensitive to temperature and system pressure, but not to gas flow rate. Another factor that influences the reproducibility of the evaporation is the stability of the material during storage. Storing the precursors below -10°C seems to help. © 1994.