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Fabrication-Induced Warpage Characterization Analysis of Micro-LED Fan-Out Packaging
期刊文章

Fabrication-Induced Warpage Characterization Analysis of Micro-LED Fan-Out Packaging

C.-C. Lee, M.-K. Shih, Z.-A. Huang, Y.-J. Tsai, M.-H. Wu, C.-Y. Yeh 和 Y.-Y. Hsu
IEEE Transactions on Components, Packaging and Manufacturing Technology, 卷.15(3), 頁碼.603-612
2025
Web of Science ID: WOS:001449688100021

摘要

Equivalent material approach fan-out (FO) package finite element analysis (FEA) mini light-emitting diode (LED) process modeling Chip scale packages Melt spinning Metal casting Metal castings Silicon wafers Substrates Equivalent material approach Fan Out Fan-out package Finite element analyse Finite element analyze Lightemitting diode Mini light-emitting diode Process-models Redistribution layers Warpages Surface mount technology
The advancement of light-emitting diode (LED) packaging technology has been driven by the increasing demand for high-performing and compact lighting solutions. Traditional packaging methods, such as chip-on-board technology and surface-mount technology, face challenges in meeting the demands for high input/output density and effective thermal management. This scenario has led to the adoption of advanced packaging technologies, including wafer-level packaging (WLP) and fan-out (FO) technology, which offer advantages such as improved surface flatness, reduced dielectric loss, and cost-effectiveness. This study presents a novel FO-LED architecture with a redistribution layer (RDL)-first design to achieve high density and thin form factors. A 3-D finite element analysis (FEA) model that incorporates equivalent material properties for the RDL and Cu pillar bumps is developed to analyze the warpage behavior induced during the FO-LED assembly fabrication process. The model's validity is confirmed by comparing simulation results with experimental measurements obtained at various stages of FO-LED fabrication. A parametric study is conducted to evaluate the impact of four control factors-Young's modulus of polyimide (PI), coefficient of thermal expansion (CTE) of PI, RDL thickness, and curing temperature-on warpage performance. The findings highlight that the warpage in the FO-LED is significantly affected by the CTE mismatch between the RDL, the LED, and the silicon substrate, with the properties of the PI material playing a crucial role. These insights offer valuable guidance for the design and optimization of robust FO-LED packages. © 2011-2012 IEEE.

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-105001070900&doi=10.1109%2fTCPMT.2025.3538039&partnerID=40&md5=f9e4e6336322453e116d74388b6c0884檢視

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機構合作
國際合作
引用書目主題
7 Engineering & Materials Science
7.272 Electrical - Solder & Connections
7.272.538 Solder Joints
Web Of Science研究領域
Engineering, Electrical & Electronic
Engineering, Manufacturing
Materials Science, Multidisciplinary
ESI研究領域
Engineering

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