Abstract
The technique of transferring Au nanowire onto HSQ by using nanoimprinting was studied. The Au nanowires were fabricated by immersion plating and investigated by SEM, AFM, and TEM analysis. The concentration of HF in the electroplating solution affects the nucleation and growth of the Au. The process of imprinting HSQ was also investigated. The Au wire transfer results were also investigated by using SEM photography and an optical microscope. Nanowires with width ∼197 nm and microwires with width ∼2 νm can be successfully transferred onto HSQ substrates. © 2005 IOP Publishing Ltd.