摘要
This paper presents the microfabrication technique for a dome-shaped-diaphragm transducer (DSDT) for 200 MHz cellular microstructure imaging. The DSDT uses piezoelectric ZnO film to generate acoustic waves, and is fabricated on a silicon substrate. The fabricated DSDTs have been tested with a pulse-echo method using a quartz target, and shown to produce an echo signal at 210 MHz with 20% bandwidth. The DSDT fabrication uses spherical balls to precisely shape wax molds, onto which parylene is deposited as a support layer for the DSDT. The wax molds are removed by toluene to release the parylene dome diaphragms. Piezoelectric ZnO film is sputter deposited on the parylene dome diaphragm. E-Solder silver epoxy is placed and cured on the back surface to function both as an acoustic backing and as structural support. Quarter wavelength thick parylene is deposited on the front side of the wafer for acoustic matching. The fabrication technique for the DSDTs is meant for low-cost mass production of the devices for high-frequency biomedical imaging. Moreover, the technique allows the precise control of the radius and curvature of the dome-shaped diaphragm through adjusting the size of the front-to-backside thru holes using different radii of the spherical balls. © 2005 IOP Publishing Ltd.