摘要
A titanium nitride (TiN) inverse opal structure was fabricated on carbon paper as a support of Pt for application in proton exchange membrane fuel cell (PEMFC). Polystyrene spheres with different diameters were coated on carbon paper by spin coating in multilayers as a template. Titanium dioxide (TiO 2 ) thin film was then deposited on the template by atomic layer deposition (ALD). The TiN inverse opal structure was fabricated by direct nitridation of TiO 2 in flowing ammonia atmosphere at above 800 °C. Platinum nanoparticles were then deposited uniformly on TiN by ALD. The performances of PEMFC using Pt@TiN@carbon paper composite as electrodes were examined. The homemade electrodes showed at least 13 times higher platinum specific power density than commercial E-Tek electrodes.