摘要
Conformal parallel arrays of Al-doped TiO 2 nanotubes were fabricated by atomic layer deposition. TiO 2 /Al 2 O 3 bilayered shells were grown on a polycarbonate template by various cyclic sequences of TiO 2 and Al 2 O 3 . The doping level of Al could be tuned by the fraction of cycle number of Al 2 O 3 . From the depth profiles measured by second ion mass spectrometry, Al is uniformly distributed across the thickness, which is also supported by the analyses of X-ray diffraction, X-ray photoelectron spectroscopy, and Raman spectroscopy. A uniform bulk solubility of ~7 at.% and the surface concentration of ~18 at.% were observed with the cycle ratio of Al 2 O 3 : TiO 2 at 0.04.