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Fabrication of three-dimensional autocloned photonic crystal on sapphire substrate
Journal article   Open access   Peer reviewed

Fabrication of three-dimensional autocloned photonic crystal on sapphire substrate

Hao Ming Ku, Chen Yang Huang and Shiuh Chao
Applied Optics, Vol.50(9)
20/03/2011

Abstract

We applied the laser interference lithography method to form a patterned sapphire substrate (PSS). A three-dimensional photonic crystal was formed by autocloning the PSS with alternate Ta2O5/SiO2 coatings. A high total integrated reflectance (TIR) band was obtained around the 410 to 470nm wavelength range that matched the emission spectrum of the gallium nitride (GaN) light-emitting diode (LED) for\ application in manipulating the light extraction of the sapphire-based GaN LED. © 2010 Optical Society of America.
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