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Facet-dependent electrical conductivity properties of a 4H-SiC wafer
期刊文章

Facet-dependent electrical conductivity properties of a 4H-SiC wafer

Gautam Kumar, Jing-Wei Chen, Hsueh-Heng Ma, Xing-Fu HuangMichael H. Huang
Journal of Materials Chemistry C, 卷.10(28), 頁碼.10424-10428
06/2022

摘要

Chemistry (all) Materials Chemistry
Intrinsic {0001} 4H-SiC wafer cut to expose {101̄0} and {12̄10} side faces allows for conductivity measurements on different crystal surfaces. The wafer has a band gap of 3.20 eV. Its {0001} face gives a strong emission band at 384 nm, but the {101̄0} face is barely emissive. The {0001} face is also highly electrically conductive. The {101̄0} and {12̄10} faces show similar but comparatively less conductivity than the {0001} face. Clean current-rectifying I-V curves are obtained for the {0001}/{101̄0} facet combination, so novel transistors can be fabricated using the electrical facet effect. Moreover, the SiC wafer displays clear photoconductivity properties.

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