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Ferroelectric and dielectric characteristics of (Pb1-yLay)[Mg(x+2y)/3Nb(2x+y) /3Ti1-x-y]O3 thin films prepared by RF magnetron sputtering
Journal article

Ferroelectric and dielectric characteristics of (Pb1-yLay)[Mg(x+2y)/3Nb(2x+y) /3Ti1-x-y]O3 thin films prepared by RF magnetron sputtering

Ming Chrong Jiang, Tai Bor Wu and JENN-MING WU
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, Vol.34(6 A), pp.3153-3158
06/1995

Abstract

Ferroelectric thin films denoted as PLMNT were prepared on Pt/Ti/SiO 2 /Si substrates by rf magnetron sputtering deposition at 520°C. In all compositions, pure perovskite films were obtained. These films exhibit ferroelectric and dielectric characteristics. The perovskite films obtained are described with respect to their ferroelectric and dielectric characteristics.

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