Abstract
Highly (117)- and (001)-oriented Bi 3.25 La 0.75 Ti 3 O 12 (BLT) thin films were fabricated on Pt/TiO 2 /SiO 2 /Si(100) substrates by chemical solution deposition under the appropriate baking and crystallization conditions. The (117)-oriented BLT films exhibited higher remanent polarization (2P r =24μC/cm 2 ), than did (001)-oriented BLT films, which exhibited only a slight amount of polarization (2P r =6.6μC/cm 2 ). The results of fatigue and retention tests revealed that neither film was fatigued up to 1×10 10 switching cycles, and the retained charge was unchanged for 1×10 4 s. © 2002 American Institute of Physics.