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Field-effect passivation and degradation analyzed with photoconductance decay measurements
Journal article   Peer reviewed

Field-effect passivation and degradation analyzed with photoconductance decay measurements

Yi-Yang Chen, Pi-Yu Hsin, Caspar Leendertz, Lars Korte, Bernd Rech, Chen-Hsu Du and Jon-Yiew Gan
Applied Physics Letters, Vol.104(19), 193504
12/05/2014

Abstract

In this article, an expression for the surface passivation has been derived in terms of the surface recombination velocity and the field-effect exponential. The analytical solutions provide a comprehensive understanding of the injection dependency of minority charge carrier lifetime as measured by photoconductance decay. The model has been utilized to analyze the field-effect passivation of silicon exerted by the fixed dielectric charge in an overlying dielectric film. Possible limitations and restrictions of the technique are also addressed. © 2014 AIP Publishing LLC.

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